Spatial color-encoded phase-shifting technique for phase measuring deflectometry

被引:0
作者
Ma, Suodong [1 ,2 ]
Lu, Guojun [3 ]
Dai, Fang [4 ]
Zeng, Chunmei [1 ,2 ]
Shen, Hua [5 ]
机构
[1] Soochow Univ, Coll Phys Optoelect & Energy, Key Lab Modern Opt Technol, Educ Minist China, Suzhou 215006, Peoples R China
[2] Soochow Univ, Key Lab Adv Opt Mfg Technol Jiangsu Prov, Suzhou 215006, Peoples R China
[3] North Informat Control Res Acad Grp Co Ltd, Nanjing 211100, Jiangsu, Peoples R China
[4] East China Inst Photoelectron IC, Bengbu 233000, Peoples R China
[5] Nanjing Univ Sci & Technol, MIIT Key Lab Adv Solid Laser, Nanjing 210094, Jiangsu, Peoples R China
来源
SIXTH INTERNATIONAL CONFERENCE ON OPTICAL AND PHOTONIC ENGINEERING (ICOPEN 2018) | 2018年 / 10827卷
基金
中国国家自然科学基金;
关键词
Free-form surface testing; Phase measuring deflectometry; Spatial color-encoded phase-shifting; SYSTEMS; SURFACE;
D O I
10.1117/12.2500564
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Free-form optics has been attracted huge interest since it can significantly improve the performance of an optical system with a simpler structure. However, optical testing for free-form surfaces is usually more difficult compared with traditional ones. Although a variety of interferometers can achieve measurements with nanometer-scale precision, it suffers from the problems of a complex system configuration, a limited measurement range and relatively high requirements of testing conditions, etc. In contrast, phase measuring deflectometry (PMD) which has the benefits of a simple system structure, a large dynamic range and a high measurement accuracy is gradually becoming a powerful tool for free-form surface testing. Nevertheless, multiple groups of fringe patterns are required to sequentially display in two orthogonal directions to obtain the corresponding surface gradients in the classical PMD measurement. Therefore, a speedy detection of free-form surfaces is generally blocked. To overcome the above shortcoming, a spatial color-encoded phase-shifting strategy is put forward for PMD to acquire absolute phases with only four color images in this paper. Experimental results demonstrate the effectiveness of the proposed method as well.
引用
收藏
页数:7
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