Profilometry based on optical frequency comb

被引：0

作者：

Choi, Samuel ^{[1
]}

Kurokawa, Takashi ^{[1
]}

机构：

[1] Tokyo Univ Agr & Technol, Grad Sch Engn, Koganei, Tokyo 1848588, Japan

来源：

2009 LASERS & ELECTRO-OPTICS & THE PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, VOLS 1 AND 2 | 2009年

关键词：

interferometer; profilometry; optical frequency comb; microscope; supercontinuum; TOMOGRAPHY; DIODE; LASER;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a frequency-comb-based interferometric microscope Broadband optical frequency comb (OFC) was generated using optical pulse synthesizer and non-linear fiber as the light source of interferometer Three-dimensional surface profile was successfully observed with a resolution of 44 mu m and measurement speed of 30 frame/s

引用

页码：1229 / 1230

页数：2

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