Radial shearing interferometer for in-process measurement of diamond turning

被引：11

作者：

Kohno, T ^{[1
]}

Matsumoto, D ^{[1
]}

Yazawa, T ^{[1
]}

机构：

[1] Tokyo Metropolitan Inst Technol, Tokyo, Japan

来源：

ULTRAHIGH- AND HIGH-SPEED PHOTOGRAPHY AND IMAGE-BASED MOTION MEASUREMENT | 1997年 / 3173卷

关键词：

interferometer; radial shearing; zone plates; figure measurement; on-machine measurement; in-process measurement;

D O I：

10.1117/12.294519

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A stable interferometer using two zone plates to measure concave mirror figure is developed. The principle of the measurement is based on the radial shearing interference in which the measuring wavefront from the entire mirror surface under test. is referred to that of the central part. On-machine experiments showed that the interferometer would be applicable to the in-process measurement for a diamond turning in about 0.06 mu m p-p accuracy.

引用

页码：280 / 285

页数：6