共 50 条
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- [4] 2 ION FLUID MODEL FOR PLASMA SOURCE ION-IMPLANTATION JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 901 - 904
- [7] Model for ion extraction from pulsed plasma source for plasma based ion implantation (PBII) REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (02): : 1187 - 1190
- [8] Plasma source ion implantation into insulators MODERN PHYSICS LETTERS B, 2001, 15 (28-29): : 1321 - 1327
- [10] Commercialization of plasma source ion implantation ADVANCES IN COATINGS TECHNOLOGIES FOR SURFACE ENGINEERING, 1996, : 111 - 118