MEMS vibratory gyroscope with highly programmable capacitive interface circuit

被引：0

作者：

Seo, Jindeok ^{[1
]}

Lim, Kyomook ^{[2
]}

Ko, Hyoungho ^{[1
]}

机构：

[1] Chungnam Natl Univ, Dept Elect, Taejon 305764, South Korea

[2] Chungnam Natl Univ, Dept Next Generat Elect Substrate Circuit, Daejeon 305764, South Korea

来源：

2012 12TH INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION AND SYSTEMS (ICCAS) | 2012年

关键词：

Gyroscope; Capacitive Interface; Programmable Circuit; SENSORS;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A programmable continuous-time capacitive ASIC for MEMS (Microelectromechanical System) vibratory gyroscope is presented. The programmable readout circuit minimizes process variations including parasitic capacitances and fabrication imperfections. The fabricated ASIC adopts continuous-time chopper-stabilized architecture to achieve low noise characteristics. To cancel the parasitic effects and to improve the temperature response, a continuous-time front-end architecture with digital trimming is proposed. The fabricated capacitive ASIC is evaluated with gyroscope sensing element. The input range and scale factor are +/- 90 deg/sec and 164 counts/deg/sec, respectively.

引用

页码：1128 / 1131

页数：4

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