Circular Aperture Effect on Radiated Emissions of Electrostatic Discharge Events

被引：1

作者：

Larson, Gregory ^{[1
]}

机构：

[1] Intel Corp, 2501 NE Century Blvd,M-S RA3-351, Hillsboro, OR 97124 USA

来源：

2019 41ST ANNUAL EOS/ESD SYMPOSIUM (EOS/ESD) | 2019年

关键词：

D O I：

10.23919/eos/esd.2019.8869994

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Waveguide cutoff phenomenon theory and the associated aperture effects on the radiated emissions of Electrostatic Discharges measured during process module assessments are introduced. Characterization of Charge Device Model (CDM) induced events were recorded with an oscilloscope at five voltage levels and three antenna heights with and without an aperture impeding free space propagation. The frequency domain response of ESD events is presented with the aid of real time spectrum analysis.

引用

页数：7