共 39 条
[1]
[Anonymous], 1970, TECHNIQUES CHEM
[3]
Micromachined thermally based CMOS microsensors
[J].
PROCEEDINGS OF THE IEEE,
1998, 86 (08)
:1660-1678
[10]
DICKERT FL, 1993, BER BUNSEN PHYS CHEM, V97, P184