Surface metrology algorithm testing system

被引：32

作者：

Bui, Son H. ^{[1
]}

Vorburger, Theodore V. ^{[1
]}

机构：

[1] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA

来源：

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2007年 / 31卷 / 03期

关键词：

surface; topography; textures; roughness; parameters; filtering; software; database; Internet; website;

D O I：

10.1016/j.precisioneng.2007.01.002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents the development of a Web-based surface metrology algorithm testing system. The system includes surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a Website at the National Institute of Standards and Technology (NIST), USA. Manufacturers, instrument makers, and researchers have access via the Internet to standard data sets and analysis tools located on a NIST server. The system serves to validate the accuracy of algorithms as well as the calculation of surface parameters in industry. The System can be accessed through http://syseng.nist.gov/VSC/jsp. Published by Elsevier Inc.

引用

页码：218 / 225

页数：8

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