共 9 条
[2]
Bakshi V., 2006, EUV Sources for Lithography
[7]
*INT TECHN ROADM S, 2007, ITRS REP LITH
[8]
Determination of charge state, energy and angular distributions of tin ions emitted from laser produced plasma based EUV sources.
[J].
HCI 2006: 13TH INTERNATIONAL CONFERENCE ON THE PHYSICS OF HIGHLY CHARGED IONS,
2007, 58
:391-+
[9]
TAKENOSHITA K, 2005, P SPIE, V5751