New system for two-dimensional analysis of hydrogen on solid surfaces

This article reports the development of a two-dimensional analyzer, which enables us to observe the distribution of hydrogen on surfaces. A micro-focused electron beam with low primary electron energy (<1 keV) is scanned over a sample surface, in conjunction with a time-of-flight type electron-stimulated desorption spectroscope, to obtain clear H+ ion images of a specimen surface. A line scan analysis of H+ ions on an integrated circuit and a scanning electron-stimulated desorption image of H+ ions on a Cu mesh are presented as demonstrations. (C) 1997 American Institute of Physics. [S0034-6748(97)02411-8].