PIC MC Using Free Path for the Simulation of Low-Pressure RF Discharge in Argon

被引：11

作者：

Benyoucef, Djilali ^{[1
,2
]}

Yousfi, Mohammed ^{[1
]}

Belmadani, Bachir ^{[2
]}

Settaouti, A. ^{[3
]}

机构：

[1] Univ Toulouse 3, Univ Toulouse, LAPLACE, UMR CNRS 5213, F-31062 Toulouse, France

[2] Univ Chlef, Dept Electrotech, Chlef 02000, Algeria

[3] Univ Sci & Technol Oran, Electrotech Dept, Oran 31000, Algeria

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 2010年 / 38卷 / 04期

关键词：

Particle-in-cell (PIC) method; radio-frequency (RF) low-pressure discharge; MONTE-CARLO-SIMULATION; REFERENCE CELL; COLLISION; MOTION; MODEL;

D O I：

10.1109/TPS.2010.2042305

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

In this paper, we used the particle-in-cell/Monte Carlo techniques 1 Dimension 3 Velocities and 3 Dimensions 3 Velocities to simulate low-pressure radio-frequency (RF) discharge in argon. The plasma conditions are 50-100 mtorr of pressure and 200 V of peak RF voltage at 13.56 MHz. The method used in collision treatment is based on an optimized estimation of the collision free path which is independent of the electron energy. It depends only on the maximum of total cross sections. To reduce the number of null collisions, two maximums of total cross sections are chosen. The results obtained were compared with data from experiments that were already carried out.

引用

页码：902 / 908

页数：7

共 15 条

[1] FREQUENCY-EFFECTS IN CAPACITIVELY COUPLED RADIOFREQUENCY GLOW-DISCHARGES - A COMPARISON BETWEEN A 2-D FLUID MODEL AND EXPERIMENTS [J].