Flying height measurement metrology for ultra-low spacing in rigid magnetic recording

被引:12
作者
Li, YF
Menon, A
机构
[1] SAMSUNG INFORMAT SYST AMER, SAN JOSE, CA 95134 USA
[2] SEAGATE TECHNOL, BLOOMINGTON, MN 55420 USA
关键词
D O I
10.1109/20.477562
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Flying height measurement metrology is presented for ultra-tow spacing in rigid magnetic recording. The issues related to intensity interferometric flying height measurement method are studied. This includes the flying height measurement shift induced by slider material, the dependence of slider optical constants on measurement angle of incidence and location, flying height measurement repeatability, flying height tester calibration, and the effect of glass disk.
引用
收藏
页码:129 / 134
页数:6
相关论文
共 23 条
[1]   A GAS FILM LUBRICATION STUDY .3. EXPERIMENTAL INVESTIGATION OF PIVOTED SLIDER BEARINGS [J].
BRUNNER, RK ;
HARKER, JM ;
HAUGHTON, KE ;
OSTERLUND, AG .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1959, 3 (03) :260-274
[2]  
BRUNO M, IN PRESS J APPL PHYS
[3]  
DAHLGREN RP, 1986, Patent No. 4624564
[4]  
Edwards D.F., 1985, Handbook of optical constants of solids
[5]   INFRARED-LASER INTERFEROMETER FOR MEASURING AIR-BEARING SEPARATION [J].
FLEISCHER, JM ;
LIN, C .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1974, 18 (06) :529-533
[6]  
GUERRA JM, 1836, Patent No. 468451
[7]   MULTI-CHANNEL INTERFEROMETRIC MEASUREMENTS OF SLIDER FLYING HEIGHT AND PITCH [J].
HENZE, D ;
MUI, P ;
CLIFFORD, G ;
DAVIDSON, RJ .
IEEE TRANSACTIONS ON MAGNETICS, 1989, 25 (05) :3710-3712
[8]  
LACEY C, PHASE METRICS REPORT
[9]  
LI Y, 1995, ADV INFO STORAGE SYS, V6, P55
[10]  
LI Y, 1994, NOV ASME WINT ANN M