Effect of geometry and materials on residual stress measurement in thin films by using the focused ion beam

被引:23
作者
Kang, KJ [1 ]
Darzens, S
Choi, GS
机构
[1] Chonnam Natl Univ, Dept Mech Engn, Kwangju 500757, South Korea
[2] Princeton Univ, Princeton Mat Inst, Princeton, NJ 08540 USA
来源
JOURNAL OF ENGINEERING MATERIALS AND TECHNOLOGY-TRANSACTIONS OF THE ASME | 2004年 / 126卷 / 04期
关键词
D O I
10.1115/1.1789965
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Recently, a new method for residual stress measurement in thin films by using the focused ion beam (FIB) has been proposed by the authors. It is based on the combined capability of the FIB imaging system and of high-resolution strain mapping software (VIC-2D). A simple equation based on two-dimensional elasticity is used to evaluate the residual stress from the displacements due to introducing a slot. The slot length is assumed to be much larger than the slot width or depth. And the effect of the slot width was neglected. However, it is often hard, depending on film materials, to introduce a narrow and deep slot by FIB. In this work some practical issues regarding the slot geometry are addressed. Through two- and three-dimensional finite element analyses, it is explored how the slot length, width and measurement location affect the displacements which are the basic data for residual stress evaluation. As a result, the validity and limit of the equations based on two-dimensional elasticity are evaluated. Also, the effect of material dissimilarity between film and substrate is explored. Finally, examples for a diamond-like carbon film on glass substrate and an aluminum oxide film thermally grown upon an alloy are presented.
引用
收藏
页码:457 / 464
页数:8
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