Atmospheric pressure chemical vapour deposition of electrochromic Mo-W thin oxide films: Structural, optoelectronic and vibration properties

被引:15
作者
Gesheva, K. A. [1 ]
Ivanova, T. [1 ]
Kozlov, M. [2 ]
Boyadzhiev, S. [3 ]
机构
[1] Bulgarian Acad Sci, Cent Lab Solar Energy & New Energy Sources, BU-1784 Sofia, Bulgaria
[2] Univ Texas Dallas, Dept Chem, Richardson, TX 75083 USA
[3] Tech Univ Sofia, Dept Microelect, Sofia, Bulgaria
关键词
Characterization; Crystal structure; Surface structure; Chemical vapour deposition processes; Oxides; WO3; DEVICES;
D O I
10.1016/j.jcrysgro.2010.01.001
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Transition metal oxides exhibit electrochromic effect, under a small voltage they transfer from transparent state to colored one and if voltage polarity is turned back, they bleach again. Oxide coatings possess this ability, but in order to exhibit it, they should be part of a multilayer system-electrochromic device. Atmospheric pressure chemical vapour deposition technology was used for preparation of mixed MoO(3)-WO(3) films, utilizing thermal decomposition of tungsten and molybdenum carbonyls mixture in oxygen atmosphere. Surface morphology of the films was studied by Field emission scanning electron microscopy (FESEM). Micro Raman spectroscopy was applied for studying crystalline structure and X-Ray photoelectron spectroscopy (XPS) revealed the chemical composition of the mixed oxide thin films. The films of MoO(3)-WO(3) show improved electrochromic characteristics compared to single oxide films, especially when the mixed films are in as deposited state and possess amorphous structure. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:1188 / 1192
页数:5
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