Low-temperature crystallization of metal organic decomposition BaTiO3 thin film by hydrothermal annealing

被引：8
作者：
Wei, ZQ [1 ]
Xu, HP [1 ]
Yamashita, K [1 ]
Okuyama, M [1 ]
机构：
[1] Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 7A期
关键词：
BaTiO3; thin film; hydrothermal; MOD; temperature;
D O I：
10.1143/JJAP.39.4217
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
BaTiO3 (BTO) thin films with perovskite structure have been prepared on Ti/Pt/Ti/SiO2/Si substrate using a combined process of conventional metal organic decomposition (MOD) process and a hydrothermal method. BTO thin films with poly-crystalline structure are obtained on silicon at processing temperatures lower than 200 degrees C. X-ray diffraction patterns show that well-developed crystallites with a pure perovskite phase have been formed. Scanning electron microscopy (SEM) and Raman spectroscopy results show that the structure of as-treated BTO thin film strongly depends on the hydrothermal treatment temperature.
引用
收藏
页码：4217 / 4219
页数：3
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