Low-temperature crystallization of metal organic decomposition BaTiO3 thin film by hydrothermal annealing

被引：8

作者：

Wei, ZQ ^{[1
]}

Xu, HP ^{[1
]}

Yamashita, K ^{[1
]}

Okuyama, M ^{[1
]}

机构：

[1] Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 7A期

关键词：

BaTiO3; thin film; hydrothermal; MOD; temperature;

D O I：

10.1143/JJAP.39.4217

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

BaTiO3 (BTO) thin films with perovskite structure have been prepared on Ti/Pt/Ti/SiO2/Si substrate using a combined process of conventional metal organic decomposition (MOD) process and a hydrothermal method. BTO thin films with poly-crystalline structure are obtained on silicon at processing temperatures lower than 200 degrees C. X-ray diffraction patterns show that well-developed crystallites with a pure perovskite phase have been formed. Scanning electron microscopy (SEM) and Raman spectroscopy results show that the structure of as-treated BTO thin film strongly depends on the hydrothermal treatment temperature.

引用

页码：4217 / 4219

页数：3

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