Barrier heights of Au, Pt, Pd, Ir, Cu on nitrogen terminated (100) diamond determined by X-ray photoelectron spectroscopy

被引：8

作者：

Li, F. N. ^{[1
,2
]}

Li, Y. ^{[1
]}

Fan, D. Y. ^{[1
]}

Wang, H. X. ^{[2
]}

机构：

[1] Shenzhen Univ, Coll Optoelect Engn, Collaborat Innovat Ctr Optoelect Sci & Technol, Key Lab Optoelect Devices & Syst,Minist Educ & Gu, Shenzhen 518060, Peoples R China

[2] Xi An Jiao Tong Univ, Inst Wide Band Gap Semicond, Xian 710049, Shaanxi, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2018年 / 456卷

关键词：

CVD diamond; XPS; Barrier heights; Nitrogen terminated; BORON-DOPED DIAMOND; SURFACE-STRUCTURE; CONTACT; FILMS; XPS;

D O I：

10.1016/j.apsusc.2018.06.184

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this work, we used X-ray photoelectron spectroscopy to measure barrier height values for different metals (Au, Pt, Pd, Ir, Cu) on nitrogen terminated (1 0 0) diamond. Three types of diamond surface (hydrogen-, oxygen-, fluorine-terminated diamond surface) were used as the initial surfaces. Then, nitrogen terminated diamond surface was formed by reactive ion etching on the initial diamond surfaces for comparison. Thin films of Au, Pt, Pd, Ir and Cu were evaporated by electron beam to form metal/N-diamond contacts, respectively. The barrier height values for Au, Pt, Pd, Ir and Cu on nitrogen terminated (1 0 0) diamond contacts were determined to be 2.37 eV, 2.14 eV, 1.78 eV, 2.20 eV and 1.84 eV, respectively.

引用

页码：532 / 537

页数：6

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