Reaction mechanisms of B2H6, Si2H6,PH3 and H2Se with CuO

Chemical reactions of diborane (B2H6), disilane (Si2H6), phosphine (PH3) and hydrogen selenide (H2Se) with copper (II) oxide (CuO) at room temperature were investigated. B2H6 and Si2H6 were chemically adsorbed on CuO surface and formed B-O bond and Si-O bond, respectively. The adsorbed species on the CuO surface prevented the hydrides from diffusing into the inner part of CuO. On the other hand, PH3 and H2Se reacted with CuO forming H2O and Cu3P and CuSe, respectively. In these cases oxygen atoms were removed from CuO particles as water molecules, and the reaction proceeded to the inner part of CuO particles. The reactions of hydride gases with CuO are divided into two types: the surface reaction and bulk reaction types, depending on the enthalpy of formation of the oxide per oxygen atom which is supposed to be produced by the reaction.