Deep level investigation on n-In0.35Ga0.65As/GaAs structures

被引:0
作者
Gombia, E [1 ]
Mosca, R [1 ]
Pal, D [1 ]
Motta, A [1 ]
Nasi, L [1 ]
Bosacchi, A [1 ]
Franchi, S [1 ]
机构
[1] CNR, Ist Maspec, I-43100 Parma, Italy
关键词
D O I
10.1016/S0038-1101(97)00225-6
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have investigated the deep electronic levels in n-In0.35Ga0.65As epitaxial layers grown by molecular beam epitaxy (MBE) on graded InxGa1-xAs buffer/GaAs structures. InxGa1-xAs buffer layers with linear, parabolic and power composition grading law, respectively have been considered. The dependence of the deep levels distribution on the buffer grading law as well as on growth parameters such as the growth temperature and use of As-2 or As-4 beams is reported. (C) 1998 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:211 / 215
页数:5
相关论文
共 19 条
[1]   DEEP STATES IN GAAS GROWN BY MOLECULAR-BEAM EPITAXY [J].
BLOOD, P ;
HARRIS, JJ .
JOURNAL OF APPLIED PHYSICS, 1984, 56 (04) :993-1007
[2]   ELECTRON AND HOLE TRAPS IN HEAVILY COMPENSATED INGAAS/GAAS HETEROSTRUCTURES [J].
BUCHWALD, WR ;
ZHAO, JH ;
HARMATZ, M ;
POINDEXTER, EH .
SOLID-STATE ELECTRONICS, 1993, 36 (07) :1077-1082
[3]  
CHAKRAVARTI UK, 1990, APPL PHYS LETT, V57, P87
[4]   MULTIPLE DISLOCATION LOOPS IN LINEARLY GRADED INXGA1-XAS (0-LESS-THAN-OR-EQUAL-TO-X-LESS-THAN-OR-EQUAL-TO-0.53) ON GAAS AND INXGA1-XP (0-LESS-THAN-OR-EQUAL-TO-X-LESS-THAN-OR-EQUAL-TO-0.32) ON GAP [J].
CHANG, JCP ;
CHIN, TP ;
TU, CW ;
KAVANAGH, KL .
APPLIED PHYSICS LETTERS, 1993, 63 (04) :500-502
[5]   LATTICE-MISMATCHED IN0.53GA0.47AS/IN0.52AL0.48AS MODULATION-DOPED FIELD-EFFECT TRANSISTORS ON GAAS - MOLECULAR-BEAM EPITAXIAL-GROWTH AND DEVICE PERFORMANCE [J].
CHANG, K ;
BHATTACHARYA, P ;
LAI, R .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (07) :3323-3327
[6]   HYDROGEN PASSIVATION OF DISLOCATIONS IN INP ON GAAS HETEROSTRUCTURES [J].
CHATTERJEE, B ;
RINGEL, SA ;
SIEG, R ;
HOFFMAN, R ;
WEINBERG, I .
APPLIED PHYSICS LETTERS, 1994, 65 (01) :58-60
[7]   RECOMBINATION AT DISLOCATIONS [J].
FIGIELSKI, T .
SOLID-STATE ELECTRONICS, 1978, 21 (11-1) :1403-1412
[8]   Quasi-Schottky contacts on n-In0.35Ga0.65As epitaxial layers deposited on GaAs substrates [J].
Gombia, E ;
Mosca, R ;
Motta, A ;
Chaabane, H ;
Bosacchi, A ;
Franchi, S .
ELECTRONICS LETTERS, 1996, 32 (24) :2283-2285
[9]   HIGH-QUALITY INXGA1-XAS/INALAS MODULATION-DOPED HETEROSTRUCTURES GROWN LATTICE-MISMATCHED ON GAAS SUBSTRATES [J].
INOUE, K ;
HARMAND, JC ;
MATSUNO, T .
JOURNAL OF CRYSTAL GROWTH, 1991, 111 (1-4) :313-317
[10]   SCHOTTKY-BARRIER HEIGHT ENHANCEMENT ON N-IN0.53GA0.47AS [J].
KORDOS, P ;
MARSO, M ;
MEYER, R ;
LUTH, H .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (06) :2347-2355