A multi-channel fiber optic proximity sensor

被引:11
作者
Kim, Byeong Kwon [1 ]
Joo, Ki-Nam [1 ]
机构
[1] Chosun Univ, Dept Photon Engn, 375 Seosuk Dong, Gwangju 501759, South Korea
关键词
fiber optic sensor; multi-channel sensor; proximity sensor; spectrally-resolved interferometry; coarse wavelength division multiplexer (CWDM); INTERFEROMETER; MICROSCOPY;
D O I
10.1088/0957-0233/27/3/035104
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this investigation, we propose an efficient multi-channel optical proximity sensor based on the spectrally-resolved interferometric principle. This sensor consists of a single optical source, a spectrometer and fiber optic components such as an optical circulator, a coarse wavelength division multiplexer (CWDM) and fiber optic probes. A spectrometer is used to detect the spectral interferograms of the measuring probes according to their own spectral bandwidths and the interference signals can be separated by the spectral filtering by a CWDM. The principle of the proposed sensor system was verified with feasibility experiments with the home-built 4 channel sensor system. The measuring range of each channel was 1 mm and the resolution was a few tens of nanometers determined by the deviation of linear motions. The stability of the sensor was less than 30 nm. With the aid of a broadband source and a spectrometer, the measurement channel can be extended further by using a suitable CWDM.
引用
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页数:8
相关论文
共 13 条
[1]   Determination of fringe order in white-light interference microscopy [J].
de Groot, P ;
de Lega, XC ;
Kramer, J ;
Turzhitsky, M .
APPLIED OPTICS, 2002, 41 (22) :4571-4578
[2]   A simple phase-encoding electronics for reducing the nonlinearity error of a heterodyne interferometer [J].
Eom, Tae Bong ;
Kim, Jong Ahn ;
Kang, Chu-Shik ;
Park, Byong Chon ;
Kim, Jae Wan .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2008, 19 (07)
[3]   Modeling and analysis of an extrinsic Fabry-Perot interferometer cavity [J].
Gangopadhyay, TK ;
Mandal, S ;
Dasgupta, K ;
Basak, TK ;
Ghosh, SK .
APPLIED OPTICS, 2005, 44 (16) :3192-3196
[4]  
Guerrero H., 1990, [uS Patent, Patent], Patent No. [4,950,986, 4950986]
[5]  
Hughes R D, 1992, US Patent Specification, Patent No. 5081406
[6]   Absolute distance measurement by dispersive interferometry using a femtosecond pulse laser [J].
Joo, Ki-Nam ;
Kim, Seung-Woo .
OPTICS EXPRESS, 2006, 14 (13) :5954-5960
[8]  
Massa D. P., 1999, Sensors, V16, P34
[9]   Three-dimensional shape optical measurement using constant gap control and error compensation [J].
Park, Kyihwan ;
Choi, Kyosoon ;
Kim, Sangyoo .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2008, 79 (03)
[10]   A homodyne Michelson interferometer with sub-picometer resolution [J].
Pisani, Marco .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2009, 20 (08)