Low temperature growth of highly crystallized ZnO:Al films by ultrasonic spray pyrolysis from acetylacetone salt

被引：29

作者：

Xu, Jiwen ^{[1
]}

Wang, Hua ^{[1
,2
]}

Yang, Ling ^{[1
]}

Jiang, Minghong ^{[1
]}

Wei, Shuai ^{[1
]}

Zhang, Tingting ^{[1
]}

机构：

[1] Guilin Univ Elect Technol, Sch Mat Sci & Engn, Guilin 541004, Guangxi, Peoples R China

[2] Guilin Univ Elect Technol, Guangxi Key Lab Informat Mat, Guilin 541004, Guangxi, Peoples R China

来源：

MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS | 2010年 / 167卷 / 03期

关键词：

Ultrasonic spray pyrolysis; AZO films; Acetylacetonate; Sheet resistance; Transmittance; SOL-GEL PROCESS; CHEMICAL-VAPOR-DEPOSITION; AL THIN-FILMS; SUBSTRATE-TEMPERATURE; ELECTRICAL-PROPERTIES; TRANSPARENT CONDUCTORS; OPTICAL-PROPERTIES;

D O I：

10.1016/j.mseb.2010.02.012

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

High-quality ZnO:Al films were deposited on glass substrates at a relatively low temperature of 300 degrees C by ultrasonic spray pyrolysis. Zn(acac)(2) and Al(acac)(3) acted as zinc and aluminum source, which dissolved in ethanol-water solution. The influences of aluminum concentration and vacuum annealing on microstructure. electrical and optical properties were investigated by XRD. SEM, EDS. four-point probe and visible spectroscopy. The experimental results shown that ZnO:Al films exhibit stronger (1 0 1) preferred orientation and have lenticular-like grain morphology. The resistivity as low as 4.3 x 10(-1) Omega cm for as-deposited films was obtained at the 4 at.% doping concentration, which can be decreased to 10(-2) Omega cm level by post-deposited vacuum annealing. The average transmittance of as-deposited films was nearly 80% in the visible range, and that of 4 at.% doped ZnO films reduced to 60% after vacuum annealing at 550-600 degrees C. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：182 / 186

页数：5

共 24 条

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