A piezoresistive microcantilever magnetic-field sensor with on-chip self-calibration function integrated

被引：9

作者：

Liu, Jian ^{[1
]}

Li, Xinxin ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China

来源：

MICROELECTRONICS JOURNAL | 2007年 / 38卷 / 02期

基金：

中国国家自然科学基金;

关键词：

silicon cantilever; magnetometer; piezoresi stance; self-calibration; micromachining;

D O I：

10.1016/j.mejo.2006.11.015

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A micromachined piezoresistive cantilever magnetometer, with a self-calibration function on-chip integrated is presented. When the cantilever is subjected to a magnetic field to be measured, the magnetic force will exert upon the magnetized nickel thin-film pattern that is located at the cantilever end. The magnetic force bends the micromechanical cantilever, which is further read out by an integrated piezoresistor. For realizing the self-calibration function, an aluminum spiral is integrated around the cantilever to provide an artificial magnetic field, when an electric current flows through the spiral coil. The artificial magnetic field can be used to drive the cantilever bending and causes a self-calibration output signal. With this on-chip self-calibration scheme, the detection of magnetic field can be immune to the long-term drift in remanence of the magnetized nickel pattern, thereby, improving the sensing stability. Bulk micromachining technologies are used to fabricate the sensors. The formed sensor is used for magnetic-field measurement, resulting in the piezoresistive sensitivity as 1.06 x 10(-4)/mT and the sensing resolution 4.58 mu T. (c) 2006 Elsevier Ltd. All rights reserved.

引用

页码：210 / 215

页数：6

共 14 条

[1]

BAO M, 2000, HDB SENSORS ACTUATOR, pCH2

[2]

CARUSO MJ, 1997, SAE, P15

[3] Modeling and fabrication of a MEMS magnetostatic magnetic sensor [J].