Nanometer-scale resolution microscopy with compact extreme ultraviolet lasers

被引：0

作者：

Menoni, C. S. ^{[1
]}

Vaschenko, G. ^{[1
]}

Brizuela, F. ^{[1
]}

Brewer, C. ^{[1
]}

Wang, Y. ^{[1
]}

Larotonda, M. A. ^{[1
]}

Luther, B. M. ^{[1
]}

Marconi, M. C. ^{[1
]}

Rocca, J. J. ^{[1
]}

Chao, W. ^{[2
,3
]}

Liddle, J. A. ^{[2
,3
]}

Liu, Y. ^{[2
,3
]}

Anderson, E. H. ^{[2
,3
]}

Attwood, D. T. ^{[2
,3
]}

Vinogradov, A. V. ^{[4
]}

Artioukov, I. A. ^{[4
]}

Pershyn, Y. P. ^{[5
]}

Kondratenko, V. V. ^{[5
]}

机构：

[1] Colorado State Univ, NSF ERC Extreme Ultraviolet Sci & Technol, Dept Elect & Comp Engn, Ft Collins, CO 80523 USA

[2] Lawrence Berkeley Natl Lab, NSF ERC Extreme Ultraviolet Sci & Technol, Ctr Xray Opt, Berkeley, CA 94720 USA

[3] Univ Calif Berkeley, Berkeley, CA 94720 USA

[4] PN Lebedev Phys Inst, Moscow, Russia

[5] Natl Tech Univ KhPI, Kharkov, Ukraine

来源：

2006 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2 | 2006年

基金：

美国国家科学基金会;

关键词：

D O I：

10.1109/LEOS.2006.279114

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：895 / +

页数：2

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