The Synergistic Effect of the Laser Beam on the Thermionic Vacuum Arc Method for Titanium-Doped Chromium Thin Film Deposition

Laser-Induced Thermionic Vacuum Arc (LTVA) provides a better way to produce uniform metallic thin films than the classical Thermionic Vacuum Arc (TVA) method. In Ti-doped chromium thin films produced using LTVA, the amorphous chromium is superimposed with small bcc chromium nanoparticles. These amorphous/crystalline structures with small crystallites induce lower roughness and electrical resistivity, reducing electron-phonon scattering and increasing charge transport across LTVA thin films. A significant shift in resistivity for the LTVA samples is observed due to electron scattering on the phonon-crystalline structures in the TVA samples which exhibit larger crystallites. Meanwhile, the wettability measurements reveal a higher contact angle, resulting in a lower surface free energy and consecutively lower dissociation energy for the LTVA-produced thin films than the TVA samples.