Electrodeposition of diamond-like amorphous carbon films on Si from N,N-dimethylformamide

被引：29
作者：
Guo, D
Cai, K [1 ]
Li, LT
Huang, Y
Gui, ZL
Zhu, HS
机构：
[1] Tsing Hua Univ, Dept Mat Sci & Engn, Beijing 100084, Peoples R China
[2] Beijing Inst Technol, Res Ctr Mat Sci, Beijing 100081, Peoples R China
来源：
CHEMICAL PHYSICS LETTERS | 2000年 / 329卷 / 5-6期
关键词：
D O I：
10.1016/S0009-2614(00)00959-3
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Diamond-like carbon (DLC) films were deposited on an Si plate from N, N-dimethylformamide (DMF) with pulse-modulated power. The deposition process can be facilitated by the promotion of the temperature or the decrease of the electrode separation distance. The films were characterized by X-ray photoelectron spectroscopy (XPS), Fourier transform infrared (FTIR) spectroscopy and Raman spectroscopy, respectively. The results showed that the films were hydrogenated DLC films. Hydrogen was removed and the primary bonding in the films changed gradually from sp(3)-bonded carbon to sp(2)-bonded carbon as annealing proceeded. (C) 2000 Elsevier Science B.V. All rights reserved.
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收藏
页码：346 / 350
页数：5
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