An Iterative Qualitative-Quantitative Sequential Analysis Strategy for Electron-Excited X-ray Microanalysis with Energy Dispersive Spectrometry: Finding the Unexpected Needles in the Peak Overlap Haystack

被引:5
作者
Newbury, Dale E. [1 ]
Ritchie, Nicholas W. M. [1 ]
机构
[1] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA
关键词
qualitative X-ray analysis; energy dispersive X-ray spectrometry; scanning electron microscopy; standards-based analysis; quantitative X-ray microanalysis; DRIFT DETECTOR; CONSTITUENTS; PRECISION; ACCURACY; EDS;
D O I
10.1017/S1431927618012394
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
When analyzing an unknown by electron-excited energy dispersive X-ray spectrometry, with the entire periodic table possibly in play, how does the analyst discover minor and trace constituents when their peaks are overwhelmed by the intensity of an interfering peak(s) from a major constituent? In this paper, we advocate for and demonstrate an iterative analytical approach, alternating qualitative analysis (peak identification) and standards-based quantitative analysis with peak fitting. This method employs two "tools": (1) monitoring of the "raw analytical total," which is the sum of all measured constituents as well as any such as oxygen calculated by the method of assumed stoichiometry, and (2) careful inspection of the "peak fitting residual spectrum" that is constructed as part of the quantitative analysis procedure in the software engine DTSA-II (a pseudo-acronym) from the National Institute of Standards and Technology. Elements newly recognized after each round are incorporated into the next round of quantitative analysis until the limits of detection are reached, as defined by the total spectrum counts.
引用
收藏
页码:350 / 373
页数:24
相关论文
共 17 条
[1]  
ARMSTRONG J., 2011, 2011 AGU FALL M SAN
[2]  
Castaing R, 1951, THESIS
[3]  
Goldstein J.I., 2018, SCANNING ELECT MICRO, P209
[4]  
Lifshin E., 1974, P 9 ANN C MICR AN SO, V53
[5]  
Llovet X, 2016, MICROSC MICROANAL, V22, P1233, DOI 10.1017/S1431927616011831
[6]  
McCarthy J. J., 1981, Energy Dispersive X-Ray Spectrometry. Proceedings of a Workshop (NBS-SP-604), P273
[7]   Overcoming Peak Overlaps in Titanium- and Vanadium-Bearing Materials with Multiple Linear Least Squares Fitting [J].
Mengason, Michael ;
Ritchie, Nicholas .
MICROSCOPY AND MICROANALYSIS, 2017, 23 (03) :491-500
[8]   Electron-Excited X-Ray Microanalysis at Low Beam Energy: Almost Always an Adventure! [J].
Newbury, Dale E. ;
Ritchie, Nicholas W. M. .
MICROSCOPY AND MICROANALYSIS, 2016, 22 (04) :735-753
[9]   Performing elemental microanalysis with high accuracy and high precision by scanning electron microscopy/silicon drift detector energy-dispersive X-ray spectrometry (SEM/SDD-EDS) [J].
Newbury, Dale E. ;
Ritchie, Nicholas W. M. .
JOURNAL OF MATERIALS SCIENCE, 2015, 50 (02) :493-518
[10]   Mistakes Encountered During Automatic Peak Identification of Minor and Trace Constituents in Electron-Excited Energy Dispersive X-Ray Microanalysis [J].
Newbury, Dale E. .
SCANNING, 2009, 31 (03) :91-101