A mechanical microscope: High-speed atomic force microscopy

被引:242
作者
Humphris, ADL [1 ]
Miles, MJ [1 ]
Hobbs, JK [1 ]
机构
[1] Univ Bristol, HH Wills Phys Lab, Bristol BS8 1TL, Avon, England
基金
英国工程与自然科学研究理事会;
关键词
D O I
10.1063/1.1855407
中图分类号
O59 [应用物理学];
学科分类号
摘要
An atomic force microscope capable of obtaining images in less than 20 ms is presented. By utilizing a microresonator as a scan stage, and through the implementation of a passive mechanical feedback loop with a bandwidth of more than 2 MHz, a 1000-fold increase in image acquisition rate relative to a conventional atomic force microscope is obtained. This has allowed images of soft crystalline and molten polymer surfaces to be collected in 14.3 ms, with a tip velocity of 22.4 cm s(-1) while maintaining nanometer resolution. (C) 2005 American Institute of Physics.
引用
收藏
页码:1 / 3
页数:3
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