Change of microstructure of polyimide thin films under the action of supercritical carbon dioxide and its influence on dielectric constant

被引：8

作者：

Ronova, I. A. ^{[1
]}

Bruma, M. ^{[2
]}

Sinitsyna, O. V. ^{[1
]}

Sava, I. ^{[2
]}

Nikolaev, A. Yu. ^{[1
]}

Chisca, S. ^{[2
]}

Ryvkina, N. G. ^{[3
]}

机构：

[1] AN Nesmeyanov Organoelement Cpds Inst, Moscow 119991, Russia

[2] Petru Poni Inst Macromol Chem, Iasi 700487, Romania

[3] NN Semenov Chem Phys Inst, Moscow 117977, Russia

来源：

STRUCTURAL CHEMISTRY | 2014年 / 25卷 / 06期

基金：

俄罗斯基础研究基金会;

关键词：

Microstructure; Polyimide; Supercritical carbon dioxide; Dielectric constant; Conformational parameters; Free volume; PHYSICAL-PROPERTIES; CONFORMATIONAL RIGIDITY; POLYMERS; PERMEABILITY;

D O I：

10.1007/s11224-014-0443-1

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A series of polyimide films, whose repeating units had different contents of fluorine atoms in the structure, was subjected to swelling in supercritical carbon dioxide. The greatest increase in the free volume was 257 % of the initial value. This led to the formation of foams and reduction of the dielectric constant even below 1.5.

引用

页码：1687 / 1694

页数：8

共 50 条

[1] Change of microstructure of polyimide thin films under the action of supercritical carbon dioxide and its influence on dielectric constant
I. A. Ronova
M. Bruma
O. V. Sinitsyna
I. Sava
A. Yu. Nikolaev
S. Chisca
N. G. Ryvkina
Structural Chemistry, 2014, 25 : 1687 - 1694
[2] Change of microstructure of polyimide thin films under the action of supercritical carbon dioxide and its influence on the transport properties
Ronova, I. A.
Alentiev, A. Yu.
Chisca, S.
Sava, I.
Bruma, M.
Nikolaev, A. Yu.
Belov, N. A.
Buzin, M. I.
STRUCTURAL CHEMISTRY, 2014, 25 (01) : 301 - 310
[3] Change of microstructure of polyimide thin films under the action of supercritical carbon dioxide and its influence on the transport properties
I. A. Ronova
A. Yu. Alentiev
S. Chisca
I. Sava
M. Bruma
A. Yu. Nikolaev
N. A. Belov
M. I. Buzin
Structural Chemistry, 2014, 25 : 301 - 310
[4] Lowering the dielectric constant of polyimide thin films by swelling with supercritical carbon dioxide
Ronova, Inga A.
Bruma, Maria
Kuznetsov, Alexander A.
Nikolaev, Alexander Yu.
POLYMERS FOR ADVANCED TECHNOLOGIES, 2013, 24 (07) : 615 - 622
[5] Deposition of aromatic polyimide thin films in supercritical carbon dioxide
Haruki, Masashi
Hasegawa, Yumi
Fukui, Naoya
Kihara, Shin-ichi
Takishima, Shigeki
JOURNAL OF SUPERCRITICAL FLUIDS, 2014, 94 : 147 - 153
[6] Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
Rajagopalan, T
Lahlouh, B
Lubguban, JA
Biswas, N
Gangopadhyay, S
Sun, J
Huang, DH
Simon, SL
Mallikarjunan, A
Kim, HC
Volksen, W
Toney, MF
Huang, E
Rice, PM
Delenia, E
Miller, RD
APPLIED PHYSICS LETTERS, 2003, 82 (24) : 4328 - 4330
[7] In situ ellipsometry of porous low-dielectric constant films in supercritical carbon dioxide
Kondoh, Eiichi
Aruga, Shosaku
MICROELECTRONIC ENGINEERING, 2011, 88 (05) : 623 - 626
[8] Morphological changes of the polylactic acid microstructure under the action of supercritical carbon dioxide
S. E. Bogorodskii
T. S. Zarkhina
E. V. Kuznetsov
S. A. Minaeva
V. K. Popov
A. B. Solov’eva
P. S. Timashev
Russian Journal of Physical Chemistry B, 2014, 8 : 924 - 931
[9] Morphological changes of the polylactic acid microstructure under the action of supercritical carbon dioxide
Bogorodskii, S. E.
Zarkhina, T. S.
Kuznetsov, E. V.
Minaeva, S. A.
Popov, V. K.
Solov'eva, A. B.
Timashev, P. S.
RUSSIAN JOURNAL OF PHYSICAL CHEMISTRY B, 2014, 8 (07) : 924 - 931
[10] Condensation and cleaning of an organometallic copper compound to/from porous low-dielectric constant thin films in supercritical carbon dioxide
Kondoh, E.
Ukai, E.
Aruga, S.
PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 5, 2008, 5 (05): : 1219 - 1222

← 1 2 3 4 5 →