High Q Tunable Cavity using Dielectric Less RF-MEMS Varactors

被引：0
|
作者：
Stefanini, Romain [1 ]
Chatras, Matthieu [1 ]
Pothier, Arnaud [1 ]
Orlianges, Jean-Christophe [1 ]
Blondy, Pierre [1 ]
机构：
[1] Univ Limoges, CNRS, UMR 6172, XLIM, F-87060 Limoges, France
来源：
2009 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC 2009) | 2009年
关键词：
D O I：
暂无
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper presents first experimental results on high Q MEMS tunable microwave cavity using RF-MEMS switched varactors. MEMS varactors that have been used in this work are based on a dielectric less tunable cantilever actuator, with good reliability and well-established fabrication process. It is shown that one can obtain large Q using type of component, with measured Q(u) between 550 and 850 for a tuning range of 500 MHz around 5 GHz.
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页码：391 / 394
页数：4
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