Computer-aided design of mm-wave circuits fabricated on micromachined silicon

被引：0

作者：

Neculoiu, D ^{[1
]}

Bartolucci, G ^{[1
]}

Dragoman, M ^{[1
]}

Marcelli, R ^{[1
]}

Giacomozzi, F ^{[1
]}

Müller, A ^{[1
]}

机构：

[1] IMT Bucharest, Bucharest 72996, Romania

来源：

CAS: 2002 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, PROCEEDINGS | 2001年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design methodology for the micromachined circuits operating in the microwave and mm-wave frequency region. The design is based on dividing the circuit into membrane-supported components, bulk components and membrane to bulk transitions. Every region is modeled using appropriate and techniques using full-wave electromagnetic simulation software. As illustrative examples, the design of band-pass filter structures and double-folded slot antenna arrays are briefly described. The micromachined structures were fabricated and measured results are presented.

引用

页码：21 / 24

页数：4

共 8 条

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