Analysis of the surface of thin films of poly(p-xylylene) and its derivatives

The surface of thin films prepared by vapor deposition polymerization of poly(p-xylylene) and its chloro and cyano derivatives with functional groups attached to p-phenylene rings and films derived from poly (p-xylylene) containing two difluoromethylene groups in the backbone was studied by scanning force microsco y. The surfaces of the tested samples had a similar granular morphology with a transverse size of granules of 50-500 nm. The surface topology was quantified by analyzing the height-height correlation function for each pair of points of the surface as a function of a distance between the points. The relationship between the surface morphology and the chemical structure of polymer chain and the thickness of polymer coating was established.