Recent Progress on Nanomaterials for NO2 Surface Acoustic Wave Sensors

被引:10
作者
Dinu, Livia Alexandra [1 ]
Buiculescu, Valentin [1 ]
Baracu, Angela Mihaela [1 ]
机构
[1] IMT Bucharest, Natl Inst Res & Dev Microtechnol, Voluntari 077190, Romania
关键词
nanomaterials for NO2 detection; gas sensors; SAW devices; CHEMICAL-VAPOR-DEPOSITION; WALLED CARBON NANOTUBES; LARGE-SCALE SYNTHESIS; GAS SENSOR; HYDROTHERMAL SYNTHESIS; OXIDE; METAL; GRAPHENE; PBS; NANOWIRES;
D O I
10.3390/nano12122120
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
NO2 gas surface acoustic wave (SAW)sensors are under continuous development due to their high sensitivity, reliability, low cost and room temperature operation. Their integration ability with different receptor nanomaterials assures a boost in the performance of the sensors. Among the most exploited nano-materials for sensitive detection of NO2 gas molecules are carbon-based nanomaterials, metal oxide semiconductors, quantum dots, and conducting polymers. All these nanomaterials aim to create pores for NO2 gas adsorption or to enlarge the specific surface area with ultra-small nanoparticles that increase the active sites where NO2 gas molecules can diffuse. This review provides a general overview of NO2 gas SAW sensors, with a focus on the different sensors' configurations and their fabrication technology, on the nanomaterials used as sensitive NO2 layers and on the test methods for gas detection. The synthesis methods of sensing nanomaterials, their functionalization techniques, the mechanism of interaction between NO2 molecules and the sensing nanomaterials are presented and discussed.
引用
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页数:27
相关论文
共 114 条
[1]   Gravure Printing of ITO Transparent Electrodes for Applications in Flexible Electronics [J].
Alsaid, Dania A. ;
Rebrosova, Erika ;
Joyce, Margaret ;
Rebros, Marian ;
Atashbar, M. ;
Bazuin, Bradley .
JOURNAL OF DISPLAY TECHNOLOGY, 2012, 8 (07) :391-396
[2]   Efficient synthesis of graphene sheets using pyrrole as a reducing agent [J].
Amarnath, Chellachamy Anbalagan ;
Hong, Chang Eui ;
Kim, Nam Hoon ;
Ku, Bon-Cheol ;
Kuila, Tapas ;
Lee, Joong Hee .
CARBON, 2011, 49 (11) :3497-3502
[3]   Adsorption of O2, H2, CO, NH3, and NO2 on ZnO nanotube:: A density functional theory study [J].
An, Wei ;
Wu, Xiaojun ;
Zeng, X. C. .
JOURNAL OF PHYSICAL CHEMISTRY C, 2008, 112 (15) :5747-5755
[4]   PREPARATION OF CARBON NANOTUBES BY ARC-DISCHARGE EVAPORATION [J].
ANDO, Y ;
IIJIMA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1993, 32 (1A-B) :L107-L109
[5]  
[Anonymous], 1998, ADV MICROSYSTEMS AUT, DOI DOI 10.1007/978-3-662-39696-4_24
[6]  
Baracu A., 2019, P SMART SYSTEMS INTE, P301
[7]  
Baracu A, 2015, INT SEMICONDUCT CON, P271, DOI 10.1109/SMICND.2015.7355229
[8]   Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching [J].
Baracu, Angela M. ;
Dirdal, Christopher A. ;
Avram, Andrei M. ;
Dinescu, Adrian ;
Muller, Raluca ;
Jensen, Geir Uri ;
Thrane, Paul Conrad Vaagen ;
Angelskar, Hallvard .
MICROMACHINES, 2021, 12 (05)
[9]   Conduction model of metal oxide gas sensors [J].
Barsan, N ;
Weimar, U .
JOURNAL OF ELECTROCERAMICS, 2001, 7 (03) :143-167
[10]   Preparations, Properties, and Applications of Polyaniline and Polyaniline Thin Films-A Review [J].
Beygisangchin, Mahnoush ;
Rashid, Suraya Abdul ;
Shafie, Suhaidi ;
Sadrolhosseini, Amir Reza ;
Lim, Hong Ngee .
POLYMERS, 2021, 13 (12)