DEPOSITION OF TiN-BASED COATINGS USING VACUUM ARC PLASMA IN INCREASED NEGATIVE SUBSTRATE BIAS VOLTAGE

被引：0

作者：

Kuprin, A. S. ^{[1
]}

Leonov, S. A. ^{[1
]}

Ovcharenko, V. D. ^{[1
]}

Reshetnyak, E. N. ^{[1
]}

Belous, V. A. ^{[1
]}

Vasilenko, R. L. ^{[1
]}

Tolmachova, G. N. ^{[1
]}

Kovalenko, Vi ^{[1
]}

Klimenko, I. O. ^{[1
]}

机构：

[1] Kharkov Inst Phys & Technol, Natl Sci Ctr, Kharkov, Ukraine

来源：

PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY | 2019年 / 05期

关键词：

CHROMIUM NITRIDE COATINGS; GAS-PRESSURE; PREFERRED ORIENTATION; CAVITATION EROSION; MACROPARTICLES; GENERATION; STRESS; MECHANISM;

D O I：

暂无

中图分类号：

O57 [原子核物理学、高能物理学];

学科分类号：

070202 ;

摘要：

The paper presents the results of the study on the influence of a high substrate bias voltage from 300 up to 1300 V on the titanium nitride coating deposition under nitrogen pressure of 2 Pa. The deposition rate, phase and chemical composition, adhesion and mechanical properties of coatings, macroparticle number and size distribution were investigated.

引用

页码：154 / 160

页数：7

共 29 条

[1] Stress and preferred orientation in nitride-based PVD coatings
Abadias, G.
[J]. SURFACE & COATINGS TECHNOLOGY, 2008, 202 (11) : 2223 - 2235
[2] Factors affecting growth defect formation in cathodic arc evaporated coatings
Aharonov, RR
Chhowalla, M
Dhar, S
Fontana, RP
[J]. SURFACE & COATINGS TECHNOLOGY, 1996, 82 (03) : 334 - 343
[3] Structure and properties of TiN coatings produced with PIII&D technique using high efficiency rectilinear filter cathodic arc plasma
Akkaya, S. S.
Vasyliev, V. V.
Reshetnyak, E. N.
Kazmanli, K.
Solak, N.
Strel'nitskij, V. E.
Urgen, M.
[J]. SURFACE & COATINGS TECHNOLOGY, 2013, 236 : 332 - 340
[4] Aksenov I.I., 1978, Sov. J. Plasma Phys, V4, P425
[5] AKSENOV II, 1984, HIGH TEMP+, V22, P517
[6] Aksenov II, 1998, P INT SYMP DISCH EL, V18, P573, DOI 10.1109/DEIV.1998.738727
[7] Anders A, 2008, SPRINGER SER ATOM OP, V50, P1, DOI 10.1007/978-0-387-79108-1_1
[8] [Anonymous], 2012, Vacuum Arc: Plasma Sources, Deposition of Coatings, Surface Modification
[9] Perspectives on Titanium Science and Technology
Banerjee, Dipankar
Williams, J. C.
[J]. ACTA MATERIALIA, 2013, 61 (03) : 844 - 879
[10] Belous V.A., 2016, Sci. Innov, V12, P27

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