molecular wires;
tunneling resistance;
nonconductive film (NCF);
current carrying capability;
D O I:
10.1007/s11664-007-0101-0
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
In this paper, we introduce a novel approach of using pi-conjugated molecular wires to improve the electrical properties of nonconductive films (NCFs) for the electronic interconnects. Two thiol (-SH) terminated conjugated molecular wires, 1,4-benezenedithiol (BDT) and biphenyldithiol (BPD), are incorporated into an NCF formulation and investigated. The molecular wires can be well assembled on the gold (Au) electrodes and improve the interfacial properties of the NCF joints. The BPD exhibits higher thermal stability after curing at 150 degrees C than BDT due to the higher aromaticity (more aromatic rings) and thus more rigid structure. Formation of a self-assembled monolayer on Au electrodes can tune the effective work function (0) of Au electrodes and reduce the tunnel resistivity. Therefore, the joint resistance of NCF joints, which is the sum of tunnel resistance and constriction resistance, can be significantly reduced from 0.15 x 10(-3) Q to 0.1 x 10(-3) Omega and 0.05 x 10(-3) Omega with BDT and BPD, respectively. The improved electrical conduction and current carrying capability enables the application of the NCF in fine pitch and high performance electronic interconnects in microelectronics.
机构:
Univ Paris Saclay, Inst Galien Paris Saclay, CNRS, F-92296 Chatenay Malabry, FranceUniv Paris Saclay, Inst Galien Paris Saclay, CNRS, F-92296 Chatenay Malabry, France
Mougin, Julie
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h-index:
机构:
Bourgaux, Claudie
Couvreur, Patrick
论文数: 0引用数: 0
h-index: 0
机构:
Univ Paris Saclay, Inst Galien Paris Saclay, CNRS, F-92296 Chatenay Malabry, FranceUniv Paris Saclay, Inst Galien Paris Saclay, CNRS, F-92296 Chatenay Malabry, France
机构:
Key Laboratory of Optoelectronic Technology & Systems (MoE), Chongqing UniversityKey Laboratory of Optoelectronic Technology & Systems (MoE), Chongqing University
Wensi Cai
Zhigang Zang
论文数: 0引用数: 0
h-index: 0
机构:
Key Laboratory of Optoelectronic Technology & Systems (MoE), Chongqing UniversityKey Laboratory of Optoelectronic Technology & Systems (MoE), Chongqing University
Zhigang Zang
Liming Ding
论文数: 0引用数: 0
h-index: 0
机构:
Center for Excellence in Nanoscience (CAS), Key Laboratory of Nanosystem and Hierarchical Fabrication (CAS), National Center for Nanoscience and TechnologyKey Laboratory of Optoelectronic Technology & Systems (MoE), Chongqing University