Fabrication of gated CuO nanowire field emitter arrays for application in field emission display

被引:37
|
作者
Zhan, R. Z. [1 ]
Chen, Jun [1 ]
Deng, S. Z. [1 ]
Xu, N. S. [1 ]
机构
[1] Sun Yat Sen Univ, State Key Lab Optoelect Mat & Technol, Guangdong Prov Key Lab Display Mat & Technol, Sch Phys & Engn, Guangzhou 510275, Guangdong, Peoples R China
来源
关键词
brightness; copper compounds; field emission displays; field emitter arrays; microfabrication; nanofabrication; nanowires; oxidation; rapid thermal processing; thin films; ZINC-OXIDE NANOWIRES; LOW-TEMPERATURE; FILMS;
D O I
10.1116/1.3428544
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Using nanowire field emitters can be a way to overcome the high cost of field emission display using Spindt-type tip arrays. How to integrate nanowire emitters into the field emission display device structure without influencing the device structure is an important issue. In this study, a gated CuO nanowire field emitter arrays were fabricated by a microfabrication process. By using a thermal oxidation process, the CuO nanowire field emitter arrays are prepared from copper thin film pads defined in a planar-gate structure. Effective emission current modulation by the gate voltage is achieved. Using a green phosphor screen as anode, a brightness of 92 cd/m(2) was obtained at an anode voltage of 4.5 kV and a gate voltage of 120 V when operating under direct current mode. A vacuum-packaged field emission display using CuO nanowire field emitter arrays was also fabricated and display of moving images was demonstrated. The reported technique could be a promising route to achieved large area field emission display with high resolution display at low cost. (C) 2010 American Vacuum Society. [DOI: 10.1116/1.3428544]
引用
收藏
页码:558 / 561
页数:4
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