Large-scale broad-band parasitic extraction for fast layout verification of 3-D RF and mixed-signal on-chip structures

In this paper, a methodology for efficient parasitic extraction and verification flow for RF and mixed-signal integrated-circuit designs is presented.. The implementation of a multiplane precorrected fast Fourier transform (PFFT)-computational engine enables the full-wave electromagnetic (EM) simulation of interconnects and passive components. The PFFT algorithm is implemented on a set of two-dimensional fast Fourier transform grids associated with the current sheets corresponding to the conductor loss models. This leads to the full-wave modeling of silicon embedded three-dimensional circuits within the two-and-one-half-dimensional computational framework yielding the O (N log N) computational complexity and O (N) memory requirements of the algorithm. The broad-band capability of the EM solver is provided through the loop-tree/charge implementation of the PFFT algorithm allowing for robust full-wave modeling from dc to microwaves. The EM verification flow is integrated seamlessly within the Cadence environment allowing for nonlinear circuit simulation of the entire device. The capability and accuracy of the proposed methodology is demonstrated through EM simulation results for an individual on-chip spiral inductor, as well as a low-noise amplifier.