[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
[2] Univ Elect Sci & Technol China, Collaborat Innovat Ctr Elect Mat & Devices, Chengdu 610054, Peoples R China
[3] Helmholtz Zentrum Dresden Rossendorf, Inst Ion Beam Phys & Mat Res, Bautzner Landstr 400, D-01328 Dresden, Germany
[4] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
[5] Namlab gGmbH, Nothnitzer Str 64, D-01187 Dresden, Germany
[6] Tech Univ Dresden, Inst Semicond & Microsyst, Nothnitzer Str 64, D-01187 Dresden, Germany
[7] Tech Univ Chemnitz, Dept Mat Nanoelect, Fac Elect Engn & Informat Technol, D-09126 Chemnitz, Germany