Fracture behavior of diamond films deposited by DC arc plasma jet CVD

被引:38
作者
An, Kang [1 ]
Chen, Liangxian [1 ]
Yan, Xiongbo [1 ]
Jia, Xin [1 ]
Zhao, Yun [1 ]
Zheng, Yuting [1 ]
Liu, Jinlong [1 ]
Wei, Junjun [1 ]
Lu, Fanxiu [1 ]
Li, Chengming [1 ]
机构
[1] Univ Sci & Technol Beijing, Inst Adv Mat & Technol, Beijing 100083, Peoples R China
基金
中国国家自然科学基金;
关键词
DC arc plasma jet chemical vapor deposition; Fracture strength; Columnar grain; Transgranular fracture; Intergranular fracture; GAS RECYCLING MODE; LARGE-AREA; STRENGTH; QUALITY; TECHNOLOGY;
D O I
10.1016/j.ceramint.2018.04.178
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In the present study, two types of diamond films with a diameter of 123 mm were deposited by DC arc plasma jet chemical vapor deposition (CVD) operating in the gas recycling mode. These two diamond films were found to possess peculiar grain family morphologies. The fracture strengths of the samples were 182.65 and 995.58 MPa, respectively. To investigate the possible reason for the large difference in the fracture strength between the samples, the surface and fracture morphologies of the two types of diamond films as well as their grain size were characterized. The results revealed that the sample with low fracture strength suffered from a typical intergranular fracture. Weak grain boundary, impurities distributed in the boundary, and low strength of diamond grains led to a decrease in the fracture strength. However, the sample with high fracture strength mainly suffered from transgranular fracture and the columnar grain exhibited numerous voids. Owing to the impact of twinning, the voids could be occupied, thus increasing the contact area between the adjacent grains. Moreover, large grain family on the growth side contained numerous small grains and twins. These small grains, twins on growth side along with the difference of stress on surfaces inhibit fracture strength from decreasing rapidly. All these features benefitted fracture strength. Moreover, when the sample was loaded, the tips located in the voids probably resulted in increase of risk of stress concentration, which might have led to initiation of crack origin and eventual fracture.
引用
收藏
页码:13402 / 13408
页数:7
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