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Deposition and wear resistance of Ti-B-N-C coatings on WC-Co cutting tools from alkoxide solutions by thermal plasma CVD
被引:45
作者:
Shimada, S.
[1
]
Takahashi, M.
Tsujino, J.
Yamazaki, I.
Tsuda, K.
机构:
[1] Hokkaido Univ, Grad Sch Engn, Sapporo, Hokkaido 0608628, Japan
[2] Hokkaido Elect Power Co Ltd, Res & Dev Dept, Ebetsu, Hokkaido 0670033, Japan
[3] Hokkaido Sumiden Precis Ind LTD, Sorachi Gun, Hokkaido 0790304, Japan
关键词:
thermal plasma CVD;
alkoxide solution;
Ti-B-C-N coatings;
wear resistance;
D O I:
10.1016/j.surfcoat.2007.01.041
中图分类号:
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
Double layered TiN/TiBC and composite TiBCN coatings were deposited on WC-Co cutting tools from titanium tetra-ethoxide (TTEO) and boron tri-ethoxide (BTEO) solutions at 800 degrees C for 20 min by chemical vapor deposition (CVD) in a thermal Ar/N-2,/H-2 plasma. The double layered coatings were deposited in Ar/N-2/H-2 plasma for the first 10 min, followed by another 10 min deposition in Ar/H-2 plasma. The composite TiBCN coatings of various compositions were deposited from the mixed solutions of TTEO and BTEO at a 1:2 mole ratio by changing the N-2 flow rate. The crystalline phases of the coatings were identified by thin film X-ray diffraction. The surfaces and cross sections of the coatings were observed by SEM, revealing the microstructures and thickness of the coatings. The relative concentrations of Ti, N, B, bonded and free C, and 0 in the coatings were determined semi-quantitatively from the XPS peak areas. The composite TiBCN coatings deposited on WC-Co cutting tools exhibited superior flank and crater wear resistance compared with commercial TiN coatings. (C) 2007 Elsevier B.V. All rights reserved.
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页码:7194 / 7200
页数:7
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