Electrical, optical and structural properties of aluminum doped cadmium oxide thin films prepared by spray pyrolysis technique

被引:69
作者
Kumaravel, R. [1 ]
Menaka, S. [1 ]
Snega, S. Regina Mary [1 ]
Ramamurthi, K. [1 ]
Jeganathan, K. [2 ]
机构
[1] Bharathidasan Univ, Crystal Growth & Thin Film Lab, Sch Phys, Tiruchirappalli 620024, Tamil Nadu, India
[2] Bharathidasan Univ, Ctr Nanosci & Nanotechnol, Sch Phys, Tiruchirappalli 620024, Tamil Nadu, India
关键词
Thin films; CdO; Spray pyrolysis; Atomic force microscopy; Electrical properties; TRANSPARENT CONDUCTING OXIDES; OXYGEN PARTIAL-PRESSURE; CDO; MICROSTRUCTURE;
D O I
10.1016/j.matchemphys.2010.03.022
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Transparent conducting aluminum doped cadmium oxide (CdO:Al) thin films were deposited by spray pyrolysis method on glass substrates for various concentrations of aluminum (1-5 wt.%). CdO:Al films were characterized using different techniques such as X-ray diffraction (XRD), atomic force microscopy, optical transmittance and Hall measurement. XRD analysis showed that CdO films exhibit cubic crystal structure with (2 0 0) preferred orientation. A minimum resistivity of 3.4 x 10(-4) Omega cm with carrier concentration of 4.12 x 10(20) cm(-3) is achieved when the CdO film is doped with 3 wt.% Al. The band gap value increases with doping and reaches a maximum of 2.53 eV when doping level is 3 wt.% and then decreases for higher Al doping concentration. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:444 / 448
页数:5
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