Femtosecond laser irradiation of indium phosphide in air: Raman spectroscopic and atomic force microscopic investigations

Surface modification and ablation of crystalline indium phosphide was performed with single and double 130 fs pulses from a Ti:sapphire laser. The morphological features resulting from laser processing, have been investigated by means of micro Raman spectroscopy as well as by optical, atomic force and scanning electron microscopy. The studies indicate amorphous, ablated and recrystallized zones on the processed surface. In the single-pulse irradiation experiments, several different threshold fluences could be assigned to the processes of melting, ablation and polycrystalline resolidification. Residual stress has been detected within the irradiated areas. Double-pulse exposure experiments have been analyzed in order to clarify the effect of cumulative damage in the ablation process of indium phosphide. (C) 2002 Elsevier Science B.V All rights reserved.