A differential interferometric heterodyne encoder with 30 picometer periodic nonlinearity and sub-nanometer stability

被引：16
作者：
Guan, Jun [1 ]
Koechert, Paul [1 ]
Weichert, Christoph [1 ]
Koening, Rainer [1 ]
Siaudinyte, Lauryna [1 ]
Fluegge, Jens [1 ]
机构：
[1] PTB, Bundesallee 100, D-38116 Braunschweig, Germany
来源：
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2017年 / 50卷
关键词：
Displacement measurement; Interferometric heterodyne encoder; Periodic nonlinearity; Fiber-fed encoder; DISPLACEMENT; RESOLUTION; PRINCIPLE; ERROR;
D O I：
10.1016/j.precisioneng.2017.04.019
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A differential interferometric heterodyne encoder with spatially separated input beams was developed to minimize periodic nonlinearities resulting from polarization mixing. The laser beams with different frequencies were delivered by two polarization-maintaining fibers to the encoder head. Under laboratory conditions this encoder demonstrated a system stability of 38 pm (standard deviation) and 100 pm over 30 s and 1 h respectively. In a comparison measurement with a differential heterodyne interferometer, this encoder showed periodic nonlinearities of less than 30pm without any additional correction. (C) 2017 Elsevier Inc. All rights reserved.
引用
收藏
页码：114 / 118
页数：5
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