NEXT-GENERATION LITHOGRAPHY Making a good impression

被引：0
|
作者：
Kreindl, Gerald [1 ]
Glinsner, Thomas [1 ]
Miller, Ron [2 ,3 ]
机构：
[1] EV Grp, Prod Management, A-4782 St Florian Am Inn, Scharding, Austria
[2] EV Grp, NIL Business Dev, A-4782 St Florian Am Inn, Scharding, Austria
[3] EV Grp, External R&D Program, A-4782 St Florian Am Inn, Scharding, Austria
来源：
NATURE PHOTONICS | 2010年 / 4卷 / 01期
关键词：
D O I：
10.1038/nphoton.2009.252
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
[No abstract available]
引用
收藏
页码：27 / 28
页数：2
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