Electrical Measurement Techniques in Atomic Force Microscopy

被引:35
作者
Avila, Alba [1 ]
Bhushan, Bharat [2 ]
机构
[1] Univ Los Andes, Elect & Elect Dept, Bogota, Colombia
[2] Ohio State Univ, Nanoprobe Lab Bio & Nanotechnol & Biomimet, Columbus, OH 43210 USA
关键词
scanning Kelvin force microscopy; scanning impedance microscopy; piezoresistance force microscopy; scanning capacitance microscopy; conductive atomic force microscopy; SCANNING CAPACITANCE MICROSCOPY; KELVIN PROBE; DETECTING WEAR; RESOLUTION; CONTACT;
D O I
10.1080/10408430903362230
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A conductive tip in an atomic force microscope (AFM) has extended the capability from conventional topographic imaging to electrical surface characterization. The conductive tip acts as a voltage electrode to provide stimuli and monitor electrical surface properties. In this review article, we have organized the AFM electrical techniques based on whether the electrical properties are monitored at the cantilever tip or across the sample. Furthermore, the techniques are organized based on probe detection signal. A number of acronyms are used in the literature, and the more commonly used ones are identified. The principle of each technique is described, and representative applications are presented. A better understanding of the spectrum of techniques should serve as the driver to expand the application of electrical techniques to study interdisciplinary phenomena at the nanoscale.
引用
收藏
页码:38 / 51
页数:14
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