Observation of van der Waals reconfiguration in superlattice phase change materials

被引:7
作者
Chen, Xin [1 ,2 ]
Shen, Jiabin [1 ,3 ]
Jia, Shujing [1 ,3 ,4 ]
Zheng, Yonghui [1 ]
Lv, Shilong [1 ]
Song, Zhitang [1 ]
Zhu, Min [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
[2] ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China
[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[4] Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China
基金
中国国家自然科学基金;
关键词
DEFECTS;
D O I
10.1039/c9nr03033f
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Phase change memory (PCM) is a leading candidate for nonvolatile memory applications in the big data era. However, the high power consumption, caused by melting GeTe-Sb2Te3-like phase change materials, hinders their applications. A significant step is the proposal to spatially separate GeTe and Sb2Te3 in the form of a superlattice, enabling a higher operating speed and better cyclability at reduced switching energy. However, the physical origin is under intensive debate. Recently, the swapping of the SbTe terminating layers nearest to the van der Waals (vdWs) gap has been claimed to be the mechanism for the superlattice. Here, we reported a direct atomic-scale chemical identification of two kinds of vdWs reconfigurations together with atomic simulations. The vdWs reconfigurations, which occurred at the GeTe and Sb2Te3 boundary, were demonstrated to change the electrical properties and turn this semiconductor into a conductor, leading to the resistance contrast. Besides, strong intermixing of Ge and Sb atoms was directly observed; in the most severe cases, similar to 50% of Ge in the GeTe layer diffused into the adjacent Sb2Te3 layer. Our work paves the way for deeper understanding of the phase transition of the GeTe/Sb2Te3 superlattice and the future design of non-volatile memories towards dynamic random access-like memories.
引用
收藏
页码:16954 / 16961
页数:8
相关论文
共 42 条
[1]  
[Anonymous], 2018, Nature, V554, P145, DOI DOI 10.1038/D41586-018-01683-1
[2]   PROJECTOR AUGMENTED-WAVE METHOD [J].
BLOCHL, PE .
PHYSICAL REVIEW B, 1994, 50 (24) :17953-17979
[3]   Phase change memory technology [J].
Burr, Geoffrey W. ;
Breitwisch, Matthew J. ;
Franceschini, Michele ;
Garetto, Davide ;
Gopalakrishnan, Kailash ;
Jackson, Bryan ;
Kurdi, Buelent ;
Lam, Chung ;
Lastras, Luis A. ;
Padilla, Alvaro ;
Rajendran, Bipin ;
Raoux, Simone ;
Shenoy, Rohit S. .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 28 (02) :223-262
[4]   Metal-Insulator Transition of Ge-Sb-Te Superlattice: An Electron Counting Model Study [J].
Chen, Nian-Ke ;
Li, Xian-Bin ;
Wang, Xue-Peng ;
Xie, Sheng-Yi ;
Tian, Wei Quan ;
Zhang, Shengbai ;
Sun, Hong-Bo .
IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2018, 17 (01) :140-146
[5]   Phase change random access memory cell with superlattice-like structure [J].
Chong, TC ;
Shi, LP ;
Zhao, R ;
Tan, PK ;
Li, JM ;
Lee, HK ;
Miao, XS ;
Du, AY ;
Tung, CH .
APPLIED PHYSICS LETTERS, 2006, 88 (12)
[6]  
CZUBATYJ W, 2006, CURRENT REDUCTION OV
[7]   DFT Studies of Pristine Hexagonal Ge1Sb2Te4(0001), Ge2Sb2Te5(0001), and Ge1Sb4Te7(0001) Surfaces [J].
Deringer, Volker L. ;
Dronskowski, Richard .
JOURNAL OF PHYSICAL CHEMISTRY C, 2013, 117 (29) :15075-15089
[8]  
Gault B., 2012, ATOM PROBE MICROSCOP, V160
[9]   Semiempirical GGA-type density functional constructed with a long-range dispersion correction [J].
Grimme, Stefan .
JOURNAL OF COMPUTATIONAL CHEMISTRY, 2006, 27 (15) :1787-1799
[10]   Prospective of Semiconductor Memory Devices: from Memory System to Materials [J].
Hwang, Cheol Seong .
ADVANCED ELECTRONIC MATERIALS, 2015, 1 (06)