Strategies for rapid and reliable fabrication of microoptical structures using two-photon polymerization

被引：3

作者：

Steenhusen, Sonke ^{[1
]}

Hasselmann, Sebastian ^{[1
]}

Domann, Gerhard ^{[1
]}

机构：

[1] Fraunhofer ISC, Neunerpl 2, D-97082 Wurzburg, Germany

来源：

ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS X | 2017年 / 10115卷

关键词：

Two-Photon Polymerization; Direct-Laser Write; additive manufacturing; hybrid polymers; microoptics; nanoimprint; 3D printing; ORGANIC HYBRID MATERIALS; GENERATION;

D O I：

10.1117/12.2252913

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Two-Photon Polymerization (2PP) has attracted broad interest for the fabrication of microoptical elements due to its design flexibility and precision. Along with tailored hybrid polymers a higher level of functional integration and new application concepts are enabled. As the entire volume of the desired 3D structure is filled in a point-by-point fashion, the fabrication can require several days inhibiting the adoption of 2PP as an additive manufacturing process at industrial level. We review different strategies to overcome the limitation in throughput and their impact on the patterning result. Particularly, processing using galvoscanner technology and replication of 2PP structures are highlighted.

引用

页数：9

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