Silicon-micromachined scanning confocal optical microscope

被引：181
|
作者：
Dickensheets, DL [1 ]
Kino, GS [1 ]
机构：
[1] Stanford Univ, Edward L Ginzton Lab, Stanford, CA 94305 USA
来源：
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1998年 / 7卷 / 01期
关键词：
anisotropic etching; grating lens; miniature confocal microscope; silicon micromachining; torsional mirror;
D O I：
10.1109/84.661382
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We describe a miniature scanning confocal optical microscope constructed from components micromachined using silicon and fused silica. The design, fabrication, and characterization of the components of the microscope as well as the assembly of the system are described, Sample images acquired using the instrument are also presented.
引用
收藏
页码：38 / 47
页数：10
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