Reel to reel coated conductor fabrication by evaporation

被引:12
作者
Prusseit, W. [1 ]
Hoffmann, C.
Nemetschek, R.
Sigl, G.
Handke, J.
Luemkemann, A.
Kinder, H.
机构
[1] THEVA Dunnschichttech GmbH, D-85737 Ismaning, Germany
[2] Tech Univ Munich, Dept Phys, D-85748 Garching, Germany
关键词
coated conductors; evaporation; inclined substrate deposition; superconductor films;
D O I
10.1109/TASC.2006.873263
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The commercial development of coated conductors is rapidly progressing. As a result we present an economic route to produce second generation HTS tape from the initial substrate preparation to the final metal coating. The most important and technically challenging steps are the deposition of an oriented buffer layer and the superconductor film in a reel-to-reel configuration. New evaporation techniques have been developed to enable reliable, high rate tape coating. Highly oriented MgO - buffer layers are realized by inclined substrate deposition (ISD) and DyBCO is deposited by simple e-gun evaporation yielding critical currents beyond 200 A/cm. Coated conductors have been fabricated up to 40 m length and are currently tested in a variety of applications.
引用
收藏
页码:996 / 998
页数:3
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