Transparent conducting Al:ZnO thin films on large area by efficient cylindrical rotating DC magnetron sputtering

被引：26

作者：

Dhage, Sanjay R. ^{[1
]}

Badgujar, Amol C. ^{[1
]}

机构：

[1] Int Adv Res Ctr Powder Met & New Mat ARCI, Ctr Solar Energy Mat, PO Balapur, Hyderabad 500005, Telangana, India

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2018年 / 763卷

关键词：

AZO; Transparent conducting oxide; Sputtering; Large area; PULSED-LASER DEPOSITION; CHEMICAL-VAPOR-DEPOSITION; SPRAY-PYROLYSIS TECHNIQUE; SOLAR-CELLS; ZINC-OXIDE; ZNO-AL; SUBSTRATE-TEMPERATURE; OPTICAL-PROPERTIES; ROOM-TEMPERATURE; GAS-PRESSURE;

D O I：

10.1016/j.jallcom.2018.05.234

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Al: ZnO (AZO) thin film provides non-toxic, cost effective visible light transparent conductive front contact for various photonic and electronic applications. Development of AZO thin films on large area soda lime glass substrates using direct current magnetron sputter coater with cylindrical rotating ceramic targets is investigated and is presented in this work. Design of experiments and Investigation on detailed structural, electrical, optical characterization was carried out to fine tuning of various sputter process parameters such as sputtering power, pressure and substrate temperature to obtain uniform electrical conductivity and transmittance over a large area. The best resistivity of 4.07 x 10(-4) Omega cm and transmittance of 84% with thickness uniformity better than 97% on 300mm x 300mm area glass substrate was achieved on the AZO thin films sputtered using optimized process conditions. (C) 2018 Elsevier B.V. All rights reserved.

引用

页码：504 / 511

页数：8

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