Fully integrated low phase-noise VCOs with on-chip MEMS inductors

被引：44

作者：

Park, EC ^{[1
]}

Choi, YS ^{[1
]}

Yoon, JB ^{[1
]}

Hong, S ^{[1
]}

Yoon, E ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Elect Engn & Comp Sci, Div Elect Engn, Taejon 305701, South Korea

来源：

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 2003年 / 51卷 / 01期

关键词：

CMOS compatible; inductor; microelectromechanical system (MEMS); monolithic integration; phase noise; voltage-controlled oscillator (VCO);

D O I：

10.1109/TMTT.2002.806510

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present fully integrated high-performance voltage-controlled oscillators (VCOs) with on-chip microelectromechanical system (MEMS) inductors for the first time. MEMS inductors have been realized from the unique CMOS-compatible MEMS process that we have developed to provide suspended thick metal structures for high-quality (Q) factors. Fully integrated CMOS VCOs have been fabricated by monolithically integrating these MEMS inductors on the top of the CMOS active circuits realized by the TSMC 0.18-mum mixed-mode CMOS process. Low phase noise has been achieved as -124 and -117 dBc/Hz at 300-kHz offset from carrier frequencies of 1 and 2.6 GHz, respectively, in the fabricated single-chip VCOs.

引用

页码：289 / 296

页数：8

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