Preparation of photo-curing acrylate thin films containing pd nanoparticles and their application for electroless plating catalysts

被引：2
作者：
Hamada, Takashi
Watase, Seiji
Matsuura, Yukihito
Kondo, Hiroshi
Nishioka, Noboru
Matsukawa, Kimihiro
机构：
[1] Japan Sci & Technol Agcy, Izumi Ku, Osaka 5941144, Japan
[2] Osaka Municipal Tech Res Inst, Dept Elect Mat, Joto Ku, Osaka 5368553, Japan
[3] Osaka Electrocommun Univ, Osaka 5728530, Japan
来源：
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY | 2007年 / 20卷 / 01期
关键词：
electroless copper plating; multi-functional acrylate; palladium nanoparticles; organic-inorganic hybrid films; silica nanoparticles;
D O I：
10.2494/photopolymer.20.137
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
A novel strategy to fabricate the copper pattern by electroless copper plating was investigated. The photolithographic negative patterns were fabricated by using the hybrid films with the palladium nanoparticles. The palladium nanoparticles in photo-cured acrylate thin films were an effective catalyst for the electroless copper plating, and it was easily to form the catalysis fine patterns by UV irradiation and development. Addition of silica nanoparticles to the hybrid thin films enhanced the performance of catalyst for the electroless copper plating and adhesion between the thin film and deposited copper.
引用
收藏
页码：137 / 140
页数：4
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